CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2016

Publisher

National Standards Authority of Ireland

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National Foreword
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne particle
concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing deriving
from measurements
Annex B (informative) - Additional optional tests
Bibliography

Describes a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

DocumentType	Standard
Pages	38
PublisherName	National Standards Authority of Ireland
Status	Current

Standards	Relationship
EN ISO 14644-14:2016	Identical
ISO 14644-14:2016	Identical

SAE AIR1167:1970	ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
SEMI E49 : 2017	GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004	CLEANROOM OPERATIONS
ISO 8573-8:2004	Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017)	TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 14644-3:2005	Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-7:2004	Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
IEST RP CC013.3 : 2012	CALIBRATION PROCEDURES AND GUIDELINES FOR SELECT EQUIPMENT USED IN TESTING CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO 14644-9:2012	Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
SEMI F28 : 2003(R2015)	TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002

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I.S. EN ISO 14644-14:2016

Current

Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory

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