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  • I.S. EN ISO 14644-14:2016

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    CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14)

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  01-01-2016

    Publisher:  National Standards Authority of Ireland

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    Table of Contents - (Show below) - (Hide below)

    National Foreword
    European foreword
    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 General outline of the assessment
    5 Visual inspection
    6 Assessment of suitability by airborne particle
      concentration measurements
    7 Documentation
    8 Statement on cleanroom suitability
    Annex A (informative) - Example for data processing deriving
            from measurements
    Annex B (informative) - Additional optional tests
    Bibliography

    Abstract - (Show below) - (Hide below)

    Describes a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher National Standards Authority of Ireland
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    SAE AIR 1167 : 1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
    ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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