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I.S. EN ISO 14644-17:2021

Current
Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications (ISO 14644- 17:2021)
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

14-03-2021

Publisher

National Standards Authority of Ireland

Preview

For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Particle deposition rate methodology
6 Measurement of particle deposition rate
7 Particle deposition rate level
8 Documentation
Annex A (informative) Measurement of particle deposition rate
Annex B (informative) Examples of particle deposition rate measurements
Annex C (informative) Measurement of the particle obscuration
Annex D (informative) Relationship between particle deposition rate and airborne concentration of particles
Annex E (informative) Assessment and control of particle deposition
Bibliography

This document gives direction on the interpretation and application of the results of the measurement of particle deposition rate on one or more vulnerable surfaces in a cleanroom as part of a contamination control programme.

Committee
TC 209
DocumentType
Standard
Pages
44
ProductNote
The date of any NSAIprevious adoption may not matchthe date of its original CEN/CENELEC document. THIS STANDARD ALSO REFERS TO ECSS-Q-ST-70-50C
PublisherName
National Standards Authority of Ireland
Status
Current

Standards Relationship
ISO 14644-17:2021 Identical
EN ISO 14644-17:2021 Identical

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Hardcopy - English
PDF - English
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