Surface chemical analysis X-ray photoelectron spectroscopy Reporting of results of thin-film analysis

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

23-09-2013

Publisher

International Organization for Standardization

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

DevelopmentNote	Supersedes ISO/DIS 13424. (09/2013)
DocumentType	Standard
Pages	46
PublisherName	International Organization for Standardization
Status	Current

Standards	Relationship
BS ISO 13424:2013	Identical

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