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NEN EN IEC 62047-1 : 2016

Current
Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
Published date

12-01-2013

Specifies terms for micro-electromechanical devices including the process of production of such devices.

DocumentType
Standard
PublisherName
Netherlands Standards
Status
Current

Standards Relationship
EN 62047-1:2016 Identical
IEC 62047-1:2016 Identical

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