NFPA 318 : 2018

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PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES

Publisher: National Fire Protection Association

Published: 01-01-2018

Available Formats: PDF - English - DRM, Hardcopy - English
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Table of Contents - (Show below) - (Hide below)

Chapter 1 - Administration
Chapter 2 - Referenced Publications
Chapter 3 - Definitions
Chapter 4 - Building Construction and Related Services
Chapter 5 - Hazardous Materials - General Provisions
Chapter 6 - Liquid Chemical Storage and Handling
Chapter 7 - Gas Storage and Handling
Chapter 8 - Production and Support Equipment
Chapter 9 - Exhaust Systems
Chapter 10 - Waste Treatment
Chapter 11 - Fire Protection
Chapter 12 - General Safety Precautions
Annex A - Explanatory Material
Annex B - Seismic Protection
Annex C - Production and Support Equipment
Annex D - Informational References
Index

Abstract - (Show below) - (Hide below)

Pertains to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled - containing a cleanroom or clean zone or both.

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Published
Document Type	Standard
Status	Current
Publisher	National Fire Protection Association
Pages
ISBN

Standards Referenced By This Book - (Show below) - (Hide below)

NFPA 287 : 2017	STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA)
NFPA 1404 : 2018	FIRE SERVICE RESPIRATORY PROTECTION TRAINING
NFPA 921 : 2017	GUIDE FOR FIRE AND EXPLOSION INVESTIGATIONS
NFPA 1404 SPANISH : 2006	FIRE SERVICE RESPIRATORY PROTECTION TRAINING
NFPA 1 : 2018	FIRE CODE
NFPA 1 HDBK : 2015	FIRE CODE HANDBOOK
NFPA 55 : 2016	COMPRESSED GASES AND CRYOGENIC FLUIDS CODE
NFPA 2 : 2016	HYDROGEN TECHNOLOGIES CODE
NFPA 556 : 2019	GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES
NFPA 91 : 2015	EXHAUST SYSTEMS FOR AIR CONVEYING OF VAPORS, GASES, MISTS, AND PARTICULATE SOLIDS
NFPA 556 : 2016	GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES
NFPA 204 : 2018	SMOKE AND HEAT VENTING
NFPA 13 HDBK : 2016	AUTOMATIC SPRINKLER SYSTEMS HANDBOOK
NFPA 5000 : 2018	BUILDING CONSTRUCTION AND SAFETY CODE
NFPA 556 : 2020	GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES
NFPA 400 : 2016	HAZARDOUS MATERIALS CODE
ICC 2012 INTERNATIONAL FIRE CODE : 2012	INTERNATIONAL FIRE CODE
ICC IFC CODE & COMMENTARY VOLUME 1 & 2 : 2015	IFC® Code and Commentary
NFPA 92B : 2009	SMOKE MANAGEMENT SYSTEMS IN MALLS, ATRIA, AND LARGE SPACES
NFPA 92A : 2009	SMOKE-CONTROL SYSTEMS UTILIZING BARRIERS AND PRESSURE DIFFERENCES
NFPA 1 : 2021	FIRE CODE

Standards Referencing This Book - (Show below) - (Hide below)

NFPA 2001 : 2015	CLEAN AGENT FIRE EXTINGUISHING SYSTEMS
NFPA 750 : 2015	WATER MIST FIRE PROTECTION SYSTEMS
ASTM E 2058 : 2013-01	TEST METHODS FOR MEASUREMENT OF SYNTHETIC POLYMER MATERIAL FLAMMABILITY USING A FIRE PROPAGATION APPARATUS (FPA)
UL 2360 : 1	TEST METHODS FOR DETERMINING THE COMBUSTIBILITY CHARACTERISTICS OF PLASTICS USED IN SEMI-CONDUCTOR TOOL CONSTRUCTION
FM 4910 : 2013	CLEANROOM MATERIALS FLAMMABILITY TEST PROTOCOL
NFPA FIRE PROTECTION HDBK : 20ED 2008	FIRE PROTECTION HANDBOOK
NFPA 25 : 2017	INSPECTION, TESTING, AND MAINTENANCE OF WATER-BASED FIRE PROTECTION SYSTEMS
CGA G-13 : 2016	STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES
NFPA 287 : 2017	STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA)
NFPA 329 : 2015	HANDLING RELEASES OF FLAMMABLE AND COMBUSTIBLE LIQUIDS AND GASES
SEMI S2 : 2016B	ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
ASME PV CODE SET : 2017	BOILER AND PRESSURE VESSEL CODE - COMPLETE SET
NFPA 101 : 2018	LIFE SAFETY CODE
NFPA 79 : 2015	ELECTRICAL STANDARD FOR INDUSTRIAL MACHINERY
UL 900 : 8	AIR FILTER UNITS
NFPA 400 : 2016	HAZARDOUS MATERIALS CODE
NFPA 90A : 2018	INSTALLATION OF AIR-CONDITIONING AND VENTILATING SYSTEMS
ISA 84.01 : 1996	APPLICATION OF SAFETY INSTRUMENTED SYSTEMS FOR THE PROCESS INDUSTRIES
NFPA 5000 : 2018	BUILDING CONSTRUCTION AND SAFETY CODE
FM 4922 : 1994	FUME EXHAUST DUCTS OR FUME AND SMOKE EXHAUST DUCTS
NFPA 69 : 2014	EXPLOSION PREVENTION SYSTEMS
NFPA 704 : 2017	STANDARD SYSTEM FOR THE IDENTIFICATION OF THE HAZARDS OF MATERIALS FOR EMERGENCY RESPONSE
ASME A13.1 : 2015	SCHEME FOR THE IDENTIFICATION OF PIPING SYSTEMS
CFR 49(PTS100-177) : OCT 2017	TRANSPORTATION
IEEE/ASTM SI 10 : 2010	METRIC PRACTICE
SEMI F1 : 2012	SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
NFPA 385 : 2017	TANK VEHICLES FOR FLAMMABLE AND COMBUSTIBLE LIQUIDS
UL 723 : 2010	TEST FOR SURFACE BURNING CHARACTERISTICS OF BUILDING MATERIALS
NFPA 68 : 2013	EXPLOSION PROTECTION BY DEFLAGRATION VENTING
NFPA 55 : 2016	COMPRESSED GASES AND CRYOGENIC FLUIDS CODE
ASTM E 136 : 2016-02	TEST METHOD FOR BEHAVIOUR OF MATERIALS IN A VERTICAL TUBE FURNACE AT 750 DEGREES C
NFPA 51B : 2014	FIRE PREVENTION DURING WELDING, CUTTING, AND OTHER HOT WORK
ASTM E 84 : 2017-08	TEST METHOD FOR SURFACE BURNING CHARACTERISTICS OF BUILDING MATERIALS
NFPA 70 : 2017	NATIONAL ELECTRICAL CODE
CFR 29(PT1910.1000 TO END) : 0	LABOR - OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION, DEPARTMENT OF LABOR
NFPA 12 : 2015	CARBON DIOXIDE EXTINGUISHING SYSTEMS
NFPA 1 : 2018	FIRE CODE
ASME B31.3:2016	PROCESS PIPING
ISO 14644-1 : 2015	CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION
NFPA 72 : 2016	NATIONAL FIRE ALARM AND SIGNALING CODE
NFPA 13 : 2016	INSTALLATION OF SPRINKLER SYSTEMS
NFPA 30 : 2018	FLAMMABLE AND COMBUSTIBLE LIQUIDS CODE
NFPA 1670 : 2017	OPERATIONS AND TRAINING FOR TECHNICAL SEARCH AND RESCUE INCIDENTS
NFPA 37 : 2018	INSTALLATION AND USE OF STATIONARY COMBUSTION ENGINES AND GAS TURBINES
ASTM E 119 : 2016-04	TEST METHODS FOR FIRE TESTS OF BUILDING CONSTRUCTION AND MATERIALS
UL 263 : 2011	FIRE TESTS OF BUILDING CONSTRUCTION AND MATERIALS
SEMI S14 : 2016	SAFETY GUIDELINES FOR FIRE RISK ASSESSMENT AND MITIGATION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
ASTM E 1354 : 2017 : REDLINE	Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter
SEMI S3 : 2011(R2017)E	SAFETY GUIDELINE FOR PROCESS LIQUID HEATING SYSTEMS
NFPA 497 : 2017	CLASSIFICATION OF FLAMMABLE LIQUIDS, GASES, OR VAPORS AND OF HAZARDOUS (CLASSIFIED) LOCATIONS FOR ELECTRICAL INSTALLATIONS IN CHEMICAL PROCESS AREAS
NFPA 92 : 2015	SMOKE CONTROL SYSTEMS

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NFPA 318 : 2018

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