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SEMI E52 : 2013

SEMI E52 : 2013

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

PRACTICE FOR REFERENCING GASES, GAS MIXTURES, AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS

Withdrawn date

01-07-2014

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a numerical index of gases and gas mixtures used in the semiconductor industry that will give an ordered reference for the gases and gas mixtures when used in mass flow devices.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

SEMI E54.3 : 1998(R2016) SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE
ASME MFC 21.1 : 1900 MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS

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