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SEMI E69 : 1998(R2013)

Current
Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING REPRODUCIBILITY AND ZERO DRIFT FOR THERMAL MASS FLOW CONTROLLERS
Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a standardized method to quantify the reproducibility and zero drift of a thermal mass flow controller (MFC).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E67 : 2011(R2018) TEST METHOD FOR DETERMINING RELIABILITY OF MASS FLOW CONTROLLER
SEMI PV81 : 2018 GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE
ASME MFC 21.1 : 1900 MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS

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