SEMI E77 : 2004(R2015)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR CALCULATION OF CONVERSION FACTORS FOR A MASS FLOW CONTROLLER USING SURROGATE GASES
17-05-2023
12-01-2013
Specifies a method to determine the MFC conversion factor and function between two gases. Also specifies a common basis for communication between manufacturers and users.
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