Name: SEMI PV81 : 2018
Brand: SEMI

GUIDE FOR SPECIFYING LOW PRESSURE HORIZONTAL DIFFUSION FURNACE

Published date

24-04-2018

Publisher

Semiconductor Equipment & Materials Institute

Describes several key parameters which influence the diffusion process results in low pressure.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (04/2018)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI PV81 : 2018