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SS-EN ISO 14644-14 : 2016

Current
Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Available format(s)

Hardcopy

Language(s)

English

Published date

10-11-2016

This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

Committee
TC 209
DocumentType
Standard
Pages
0
PublisherName
Standardiserings-Kommissionen I Sverige
Status
Current

Standards Relationship
EN ISO 14644-14:2016 Identical
ISO 14644-14:2016 Identical

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