EN ISO 14644-4:2001
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Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001) |
DIN EN ISO 14644-1:2016-06
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
VDI 2083 Blatt 11:2008-01
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Cleanroom technology - Quality assurance |
ISO 14644-6:2007
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Cleanrooms and associated controlled environments Part 6: Vocabulary |
ISO 14644-8:2013
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Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
DIN EN ISO 14644-10:2013-06
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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
DIN EN ISO 14644-3:2006-03
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS |
ISO 14644-2:2015
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Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
VDI 2083 Blatt 3:2005-07
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Cleanroom technology - Metrology and test methods |
VDI 2083 Blatt 10:1998-02
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Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems |
ISO 14644-5:2004
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Cleanrooms and associated controlled environments Part 5: Operations |
VDI 2083 Blatt 4.2:2011-04
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Cleanroom technology - Energy efficiency |
DIN EN ISO 14644-2:2016-05
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 2: MONITORING TO PROVIDE EVIDENCE OF CLEANROOM PERFORMANCE RELATED TO AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-2:2015) |
VDI 2083 Blatt 13.2:2009-01
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Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications |
VDI 2083 Blatt 12:2000-01
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Cleanroom technology - Safety and environmental aspects |
VDI 2083 Blatt 13.1:2009-01
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Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals |
VDI 2083 Blatt 13.3:2010-10
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Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications |
DIN EN ISO 14644-4:2003-06
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Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001) |
VDI 2083 Blatt 4.1:2006-10
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Cleanroom technology - Planning, construction and start-up of cleanrooms |
VDI 2083 Blatt 8.1:2014-10
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Cleanroom technology - Air cleanliness chemical concentration (ACC) |
VDI 2083 Blatt 15:2007-04
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Cleanroom technology - Personnel at the clean work place |
DIN EN ISO 14644-6:2007-10
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY |
DIN EN ISO 14644-5:2005-03
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Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004) |
VDI 1000:2017-02
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VDI Standardisation Work - Principles and procedures |
VDI 2083 Blatt 16.1:2010-08
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Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification |
ISO 14644-3:2005
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Cleanrooms and associated controlled environments Part 3: Test methods |
EN ISO 14644-8:2013
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Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013) |
DIN EN ISO 14644-9:2012-12
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Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) |
EN ISO 14644-5 : 2004
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 5: OPERATIONS |
ISO 14644-7:2004
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Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
VDI 2083 Blatt 5.1:2007-09
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Cleanroom technology - Cleanroom operation |
ISO 14644-1:2015
|
Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
VDI 2083 Blatt 7:2015-10
|
Cleanroom technology - Ultrapure media - Quality, supply, distribution |
ISO 14644-4:2001
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Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
EN ISO 14644-10:2013
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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013) |
VDI 2083 Blatt 17:2013-06
|
Cleanroom technology - Compatibility of materials with the required cleanliness |
EN ISO 14644-2:2015
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Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015) |
VDI 2083 Blatt 9.1:2006-12
|
Clean room technology - Compatibility with required cleanliness and surface cleanliness |
VDI 2083 Blatt 3.1:2012-06
|
Cleanroom technology - Metrology in cleanroom air - Monitoring |
EN ISO 14644-6:2007
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY |
VDI 2083 Blatt 5.2:2008-10
|
Cleanroom technology - Cleanroom operation - Decontamination of multiple-use cleanroom clothing |
EN ISO 14644-1:2015
|
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015) |
EN ISO 14644-9:2012
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Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) |
VDI 2083 Blatt 18:2012-01
|
Cleanroom technology - Biocontamination control |
ISO 14644-9:2012
|
Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
EN ISO 14644-3:2005
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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS |