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VDI/VDE 2655 Blatt 1.1:2008-03

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
Available format(s)

Hardcopy , PDF

Superseded date

02-02-2024

Language(s)

German - English

Published date

01-03-2008

Publisher

Verlag des Vereins Deutscher Ingenieure

Preliminary note
Introduction
1. Scope
2. Terms and definitions
3. Symbols and subscript symbols
4. Properties of the interference microscope
5. Reference standards and calibration methods
6. Report of results of instrument calibration
7. Measurement uncertainty
Bibliography

This guideline VDI/VDE 2655 Part 1.1 applies to interference microscopes for measuring the topography of technical surfaces.

DocumentType
Standard
Pages
39
PublisherName
Verlag des Vereins Deutscher Ingenieure
Status
Superseded
SupersededBy
Supersedes

EN ISO 25178-604:2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
UNI EN ISO 25178-604 : 2013 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS
ISO 25178-604:2013 Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
DIN EN ISO 25178-604:2013-12 GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS (ISO 25178-604:2013)
VDI/VDE 2656 Blatt 1:2008-06 Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measurement systems
BS EN ISO 25178-604:2013 Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (coherence scanning interferometry) instruments

EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
VDE-VDI 2604 : 1971 SURFACE MEASURING METHODS; ROUGHNESS ANALYSIS BY MEANS OF INTERFERENCE MICROSCOPY
ISO 12179:2000 Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
EN ISO 4288 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - RULES AND PROCEDURES FOR THE ASSESSMENT OF SURFACE TEXTURE
EN ISO 12179:2000/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - CALIBRATION OF CONTACT (STYLUS) INSTRUMENTS
EN ISO 11562:1997/AC:2008 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
DKD-R 4-2 : 1991 CALIBRATION OF STYLUS INSTRUMENTS
VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015 Microscopes Information provided to the user
ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
DIN EN ISO 11562:1998-09 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
EN ISO 3274 : 1997 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - NOMINAL CHARACTERISTICS OF CONTACT (STYLUS) INSTRUMENTS
EN ISO 5436-1 : 2000 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD; MEASUREMENT STANDARDS - PART 1: MATERIAL MEASURES

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Hardcopy - German - English
PDF - German - English
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