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    • SEMI
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    SEMI E54.11:2016(R2021)

    Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices

    Semiconductor Equipment & Materials Institute

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    SEMI F47:2006(R2012)E

    Specification for Semiconductor Processing Equipment Voltage Sag Immunity

    Semiconductor Equipment & Materials Institute

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    SEMI C40 : 2010(R2018)

    SPECIFICATION FOR POTASSIUM HYDROXIDE, 45% SOLUTION

    Semiconductor Equipment & Materials Institute

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    SEMI F100 : 2005

    Semiconductor Equipment & Materials Institute

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    SEMI F108 : 2010

    GUIDE FOR INTEGRATION OF LIQUID CHEMICAL PIPING COMPONENTS FOR SEMICONDUCTOR, FLAT PANEL DISPLAY, AND SOLAR CELL MANUFACTURING APPLICATIONS

    Semiconductor Equipment & Materials Institute

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    SEMI E66 : 2011(R2017)

    TEST METHOD FOR DETERMINING PARTICLE CONTRIBUTION BY MASS FLOW CONTROLLERS

    Semiconductor Equipment & Materials Institute

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    SEMI D61 : 2010

    TEST METHOD OF PERCEPTUAL ANGLE FOR OLED DISPLAYS

    Semiconductor Equipment & Materials Institute

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    SEMI C14 : 1995(R2013)

    TEST METHOD FOR PARTICLE SHEDDING PERFORMANCE OF 25 CM GAS FILTER CARTRIDGES

    Semiconductor Equipment & Materials Institute

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    SEMI E54.7 : 1999

    STANDARD FOR SENSOR/ACTUATOR NETWORK COMMUNICATION FOR SERIPLEX

    Semiconductor Equipment & Materials Institute

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    SEMI E49.1 : 2004

    GUIDE FOR TOOL FINAL ASSEMBLY, PACKAGING, AND DELIVERY

    Semiconductor Equipment & Materials Institute

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