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01/121101 DC : DRAFT MAR 2001

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
Superseded date

10-14-2004

Published date

11-23-2012

Publisher

British Standards Institution

1 Scope
2 Normative references
3 Terms and definitions
4 Specification of Requirements
5 Design and Construction
6 Access Devices
7 Transfer Devices
8 Siting and Installating
9 Testing and Approval
Annex A (informative) Separation continuum concept
Annex B (informative) Air handling and gas systems
Annex C (informative) Access devices
Annex D (informative) Transfer device examples
Annex E (informative) Leak testing
Annex F (informative) Design and testing of minienvironments
Annex G (informative) Calculation of maximum permissible
                      leak rate
Bibliography

BS EN ISO 14644-7

Committee
LBI/30
DocumentType
Draft
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

SEMI E45 : NOV 2001(R2007) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
EN 12298:1998 Biotechnology - Equipment - Guidance on testing procedures for leaktightness
ISO 10648-1:1997 Containment enclosures — Part 1: Design principles
SEMI S11 : 1996 ENVIRONMENTAL SAFETY, AND HEALTH GUIDELINES FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT MINIENVIRONMENTS
ISO 14698-2:2003 Cleanrooms and associated controlled environments Biocontamination control Part 2: Evaluation and interpretation of biocontamination data
ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
EN 12307:1997 Biotechnology - Large-scale process and production - Guidance for good practice, procedures, training and control for personnel
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
BS 3636:1963 Methods for proving the gas tightness of vacuum or pressurized plant
SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
ISO 14698-1:2003 Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
ENV 1631 : 1996 CLEANROOM TECHNOLOGY - DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAR AIR DEVICES
ISO 13408-1:2008 Aseptic processing of health care products — Part 1: General requirements
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
EN 12296:1998 Biotechnology - Equipment - Guidance on testing procedures for cleanability
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
ISO 10648-2:1994 Containment enclosures — Part 2: Classification according to leak tightness and associated checking methods
ISO 13408-6:2005 Aseptic processing of health care products Part 6: Isolator systems
SEMI E44 : 1996 GUIDE FOR PROCUREMENT AND ACCEPTANCE OF MINIENVIRONMENTS
ISO 13408-5:2006 Aseptic processing of health care products Part 5: Sterilization in place

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