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BS ISO 19606 - FINE CERAMICS (ADVANCED CERAMICS, ADVANCED TECHNICAL CERAMICS) - TEST METHOD FOR SURFACE ROUGHNESS OF FINE CERAMIC FILMS BY ATOMIC FORCE MICROSCOPY

Available format(s)

Hardcopy , PDF

Superseded date

03-31-2017

Language(s)

English

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Test environment
5 Roughness measurement specimens
6 Test Apparatus
7 Test apparatus calibration
8 Probe-tip Diameter Evaluation Standard Plate
9 Calibration of X-Y and Z scan axes
10 Probe-tip error evaluation
11 Roughness measurements of specimen
12 Test report
Annex A (normative) - Determination of D from D'
Annex B (informative) - Method to determine criteria
for probe-tip error

BS ISO 19606.

Committee	RPI/13
DocumentType	Draft
Pages	34
PublisherName	British Standards Institution
Status	Superseded
SupersededBy	BS ISO 19606:2017

ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 11039:2012	Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
ISO 25178-3:2012	Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy
ISO 11952:2014	Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems
ISO 11775:2015	Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
ISO 25178-2:2012	Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters