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Status of Standard is Unknown
BS EN 62047-34 ED.1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 34: TEST METHOD FOR MEMS PIEZORESISTIVE PRESSURE-SENSITIVE DEVICE ON WAFER
Available format(s)
Hardcopy , PDF
Language(s)
English
Publisher
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test conditions
5 General provisions
6 Test items and methods
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