ASTM F 1261M : 1996
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
11-11-2014
English
12-31-2010
CONTAINED IN VOL. 10.04, 2009 Determines the average electrical width of a narrow thin-film metallization line. This is meant for measuring thin metallization lines such as are used in microelectronic circuits where the width of the lines can range from micrometers to tenths of micrometers.
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