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ASTM F 2113 : 2001 : R2011

Withdrawn
Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2020)
Available format(s)

Hardcopy , PDF

Withdrawn date

01-09-2020

Language(s)

English

Published date

06-01-2011

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 10.04, 2015 Includes sputtering targets used as thin film source material in fabricating semiconductor electronic devices.

1.1 This guide covers sputtering targets used as thin film source material in fabricating semiconductor electronic devices. It should be used to develop target specifications for specific materials and should be referenced therein.

1.2 This standard sets purity grade levels, analytical methods and impurity content reporting method and format.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Committee
F 01
DocumentType
Guide
Pages
2
ProductNote
Reconfirmed 2011
PublisherName
American Society for Testing and Materials
Status
Withdrawn
Supersedes

ASTM F 3192 : 2016 Standard Specification for High-Purity Copper Sputtering Target Used for Through-Silicon Vias (TSV) Mettalization (Withdrawn 2023)

ASTM F 1593 : 2008 Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
ASTM F 1593 : 1997 Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
ASTM F 1593 : 2008 : R2016 Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer (Withdrawn 2023)

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PDF - English
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