Name: BS ISO 13083:2015
Brand: BSI

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Published date

08-31-2015

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
6 Measurement of lateral resolution of SCM with
  the sharp-edge method
7 Measurement of lateral resolution of SSRM with
  the sharp-edge method
Annex A (informative) - An example of the measurement
         of SCM resolution
Annex B (informative) - An example of the measurement
         of SSRM resolution
Bibliography

Explains a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices.

Committee	CII/60
DevelopmentNote	Supersedes 13/30203227 DC. (09/2015)
DocumentType	Standard
PublisherName	British Standards Institution
Status	Current
Supersedes	13/30203227 DC : 0

Standards	Relationship
ISO 13083:2015	Identical

ISO 18516:2006	Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy