Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

08-31-2014

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Procedure for probe characterization
6 Reporting of probe characteristics
Annex A (informative) - Dependence of AFM images on
        measurement mode and settings
Annex B (normative) - Reference sample preparation
Annex C (informative) - Example of a reference structure
Annex D (informative) - Results of EPSC measurement
        repeatability test
Annex E (informative) - Plane correction for probe shank
        profile analysis
Annex F (informative) - Example of a report
Bibliography

Defines two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles.

This International Standard specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u₀, where u₀ is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.

Committee	CII/60
DevelopmentNote	Supersedes 13/30203230 DC. (08/2014)
DocumentType	Standard
Pages	36
PublisherName	British Standards Institution
Status	Current
Supersedes	13/30203230 DC : 0

Standards	Relationship
ISO 13095:2014	Identical

ISO 11039:2012	Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy
ISO 11952:2014	Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems
ISO/TS 80004-4:2011	Nanotechnologies — Vocabulary — Part 4: Nanostructured materials

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BS ISO 13095:2014

Current

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory

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