PD 6598:1996
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Measurement techniques for the characterization of the European mini test chip
Hardcopy , PDF
05-01-2004
English
07-15-1996
1 Introduction
2 Measurements for common MOSFET parameters
2.1 Module COX
2.1.1 Objective
2.1.2 Test structure
2.1.3 Measurement
2.2 Module CJUNC
2.2.1 Objective
2.2.2 Test structures
2.2.3 Measurement
2.3 Module COVL
2.3.1 Objective
2.3.2 Test structure
2.3.3 Measurement
2.4 Module TRIOD
2.4.1 Objective
2.4.2 Test structure
2.4.3 Measurement
3 Measurements for JESSI CMOS modes specific parameters
3.1 Module LDD effects
3.1.1 Objective
3.1.2 Test structures
3.1.3 Measurement
3.2 Module threshold voltage parameters
3.2.1 Objective
3.2.2 Test structures
3.2.3 Measurement
3.3 Module KAPPA
3.3.1 Objective
3.3.2 Test structures
3.3.3 Measurement
3.4 Module subthreshold parameters
3.4.1 Objective
3.4.2 Test structures
3.4.3 Measurement
3.5 Module VMAX LAMBDA
3.5.1 Objective
3.5.2 Test structures
3.5.3 Measurement
3.6 Module substrate current
3.6.1 Objective
3.6.2 Test structures
3.6.3 Measurement
3.7 Module ringoscillator
3.7.1 Objective
3.7.2 Test structure
3.7.3 Measurement
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