CEI EN 62047-4 : 2011
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS
Hardcopy , PDF
English
01-01-2011
FOREWORD
1 Scope
2 Normative references
3 Terms, definitions, units and symbols
4 Standard environmental conditions
5 Marking
6 Quality assessment procedures
7 Test and measurement procedures
Annex A (normative) - Sampling procedures
Annex B (informative) - Classification for MEMS
technologies and devices
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
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