EN 61512-3:2008

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms, definitions and abbreviations
  3.1 Terms and definitions
  3.2 Abbreviation
4 Recipe description
  4.1 Recipe types
  4.2 General and site recipe description
      4.2.1 Manufacturing information
      4.2.2 Multiple site definitions
      4.2.3 Expansion and collapsing of the recipe type
             hierarchy
  4.3 Equipment-independent recipes
      4.3.1 Equipment-independent recipe subtypes
      4.3.2 Activities of equipment-independent recipes
      4.3.3 Input to trial or pilot production
      4.3.4 Output from trial or pilot production
      4.3.5 Control of equipment-independent recipes
      4.3.6 Equipment-independent recipe definition
      4.3.7 Equipment-independent recipe variants
      4.3.8 Source of scheduling information
      4.3.9 Equipment-independent recipes and business
             information
      4.3.10 Equipment-independent recipes for capability
             comparison
      4.3.11 Equipment-independent recipes as facility design
             specifications
  4.4 General recipes
      4.4.1 Enterprise-wide definition
      4.4.2 Purpose of a general recipe
      4.4.3 General recipe information
  4.5 Site recipes
      4.5.1 Site-specific recipes
      4.5.2 Site recipe definition
      4.5.3 Site recipe policies
  4.6 Product families and product grades
      4.6.1 Product definition
      4.6.2 Product families
      4.6.3 Product grades
5 Equipment-independent recipe contents
  5.1 Recipe information
  5.2 Recipe life cycle states
  5.3 Recipe header
  5.4 Recipe formula
  5.5 Recipe procedure
      5.5.1 Process model
      5.5.2 Process hierarchy
      5.5.3 Ideal procedure for manufacture
      5.5.4 Process stage
      5.5.5 Process operation
      5.5.6 Process action
      5.5.7 Definition of equipment requirements
      5.5.8 Process stage guidelines
      5.5.9 Process operation guidelines
      5.5.10 Process action guidelines
      5.5.11 Process action types
  5.6 Equipment requirements
      5.6.1 Requirements of final manufacturing equipment
      5.6.2 Equipment selection
      5.6.3 Constraining target equipment
      5.6.4 Managing equipment requirement definitions
  5.7 Other information
  5.8 Life cycle states
6 Equipment-independent recipe object model
  6.1 General
  6.2 Modelling techniques
  6.3 Object model
  6.4 Object relationships
  6.5 Object model elements
      6.5.1 Attributes
      6.5.2 Equipment-independent recipe
      6.5.3 Equipment requirement
      6.5.4 Equipment requirement element
      6.5.5 Equipment requirement library
      6.5.6 General recipe
      6.5.7 Material definition
      6.5.8 Material definition library
      6.5.9 Other information
      6.5.10 Percent input
      6.5.11 Percent output
      6.5.12 Process procedure
      6.5.13 Process action
      6.5.14 Process element
      6.5.15 Process element library
      6.5.16 Process element link
      6.5.17 Process element specification
      6.5.18 Process input
      6.5.19 Process operation
      6.5.20 Process output
      6.5.21 Process parameter
      6.5.22 Process stage
      6.5.23 Site recipe
7 Equipment-independent recipe representation
  7.1 Process procedure chart
  7.2 Process procedure chart notation
      7.2.1 Symbols and links
      7.2.2 Process procedure chart symbols
      7.2.3 Link types
      7.2.4 Rules for valid PPCs
  7.3 Process hierarchy
      7.3.1 Process operation and process action depiction
      7.3.2 Table representation
      7.3.3 Graphical and table view equivalence
      7.3.4 Non-procedural equipment-independent recipe
             information
      7.3.5 Equipment-independent recipe formula
      7.3.6 Material balance
      7.3.7 Equipment requirements
      7.3.8 Header and other information
8 Transformation of equipment-independent recipes to
  master recipes
  8.1 Source of information for master recipes
  8.2 Element mapping
  8.3 Stage-to-unit procedure mapping
  8.4 Transform components
      8.4.1 Master recipe component
      8.4.2 Transform components for material transfers
      8.4.3 Unit startup and shutdown components
      8.4.4 Alternate master recipe transform components
  8.5 Transformation tasks
      8.5.1 Equipment determination
      8.5.2 Using non-procedural information in transformation
      8.5.3 Creating the master recipe
  8.6 Transformation mapping
      8.6.1 Multiple possible mapping levels
      8.6.2 Process action to master recipe phase mapping
      8.6.3 Process action to master recipe operation mapping
      8.6.4 Process action to master recipe unit procedure
             mapping
      8.6.5 Transformation through process operations
      8.6.6 Transformation through process stages
Annex A (informative) General and site recipe benefits
Annex B (informative) General and site recipes in the
        enterprise
Annex C (informative) Usage questions
Annex ZA (normative) Normative references to international
         publications with their corresponding European
         publications
Bibliography