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EN ISO 14644-13:2017

Current
Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)
Published date

08-09-2017

European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General methodology
5 Object description
6 Cleanliness specifications
7 Determination of initial contamination level
8 Other requirements
9 Selection of a cleaning methodology
10 Material compatibility check
11 Cleaning validation
12 Measurement methods
13 Documentation
Annex A (informative) - Aspects of cleaning
Annex B (informative) - Cleaning methods
Annex C (informative) - Material compatibility with
        cleaning agents
Annex D (informative) - Cleanliness measurement
Bibliography

ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644‑9 and ISO 14644‑10.The following matters of general guidance will be provided:- expected surface cleanliness levels;- suitability of cleaning methods;- compatibility of surfaces with the cleaning technique;- assessment of cleaning appropriateness.The following will be excluded from this document:- classification of cleaning methods;- product produced within a cleanroom;- specific surface-related cleaning methods;- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;- detailed material characteristics;- description of damage mechanisms by cleaning processes and time-dependent effects;- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;- other characteristics of particles such as electrostatic charge, ionic charges, etc.;- chemical reactions between molecular contaminants and surfaces;- microbiological aspects of surface cleanliness;- radioactive aspects of contamination;- health and safety considerations;- environmental aspects such as waste disposal, emissions, etc.;- selection and use of statistical methods.

Committee
CEN/TC 243
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Current

ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ASTM G 122 : 1996 Standard Test Method for Evaluating the Effectiveness of Cleaning Agents
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
SAE AMS 03-2 : 2017 CLEANING AND PREPARATION OF METAL SURFACES
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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