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I.S. EN 62047-1:2016

Current
Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2016

Preview

For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

National Foreword
FOREWORD
1 Scope
2 Terms and definitions
Annex A (informative) - Standpoint and criteria in editing
        this glossary
Annex B (informative) - Clause cross-references of
        IEC 62047-1:2005 and IEC 62047-1:2015
Bibliography

Specifies terms for micro-electromechanical devices including the process of production of such devices.

DevelopmentNote
For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
DocumentType
Standard
Pages
78
PublisherName
National Standards Authority of Ireland
Status
Current

Standards Relationship
NBN EN 62047-1 : 2016 Identical
NF EN 62047-1 : 2016 Identical
SN EN 62047-1:2016 Identical
BS EN 62047-1:2016 Identical
DIN EN 62047-1:2014-05 (Draft) Identical
EN 62047-1:2016 Identical

IEC 60050-815:2015 International Electrotechnical Vocabulary (IEV) - Part 815: Superconductivity
ISO 2041:2009 Mechanical vibration, shock and condition monitoring Vocabulary
IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 60050-521:2002 International Electrotechnical Vocabulary (IEV) - Part 521: Semiconductor devices and integrated circuits

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