I.S. EN ISO 14644-14:2016
Current
The latest, up-to-date edition.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 14: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT BY AIRBORNE PARTICLE CONCENTRATION (ISO/DIS 14644-14)
Hardcopy , PDF
English
01-01-2016
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
National Foreword
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne particle
concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing deriving
from measurements
Annex B (informative) - Additional optional tests
Bibliography
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