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ISO 11039:2012

Current
Current

The latest, up-to-date edition.

Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

01-23-2012

Publisher

International Organization for Standardization

Preview

ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.

This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.

DevelopmentNote
Supersedes ISO/DIS 11039. (01/2012)
DocumentType
Standard
Pages
19
PublisherName
International Organization for Standardization
Status
Current

Standards Relationship
BS ISO 11039:2012 Identical

16/30300288 DC : 0 BS ISO 19606 - FINE CERAMICS (ADVANCED CERAMICS, ADVANCED TECHNICAL CERAMICS) - TEST METHOD FOR SURFACE ROUGHNESS OF FINE CERAMIC FILMS BY ATOMIC FORCE MICROSCOPY
13/30203230 DC : 0 BS ISO 13095 - SURFACE CHEMICAL ANALYSIS - ATOMIC FORCE MICROSCOPY - PROCEDURE FOR IN SITU CHARACTERIZATION OF AFM PROBE SHANK PROFILE USED FOR NANOSTRUCTURE MEASUREMENT
BS ISO 13095:2014 Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
ISO 11952:2014 Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems
ISO 13095:2014 Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
BS ISO 19606:2017 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy
ISO 19606:2017 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

ISO 18115-2:2013 Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy

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Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
Hardcopy - English
PDF - English
Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
Hardcopy - English
PDF - English
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