Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

08-20-2015

Publisher

International Organization for Standardization

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

DevelopmentNote	Supersedes ISO/DIS 13083. (08/2015)
DocumentType	Standard
Pages	14
PublisherName	International Organization for Standardization
Status	Current

Standards	Relationship
BS ISO 13083:2015	Identical

ISO 18516:2006	Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
ISO 18115-2:2013	Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy