Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

French, English

Published date

10-26-2017

Publisher

International Organization for Standardization

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).

The following are outside the scope of ISO 14644-15:2017:

- health and safety requirements;

- compatibility with cleaning agents and techniques;

- cleanability;

- biocontamination;

- specific requirements of equipment and materials for processes and products;

- design details of equipment.

DevelopmentNote	Supersedes ISO/DIS 14644-15. (10/2017)
DocumentType	Standard
Pages	22
ProductNote	THIS STANDARD ALSO REFERS-JIS B 9926, SEMI G67-0996 (Reapproved 0811),SEMI E137-0705 (Reapproved 1111),AIR1167, IEST-RP-CC028 THIS STANDARD ALSO REFERS-JIS B 9926,SEMI G67-0996 (Reapproved 0811),SEMI E137-0705 (Reapproved 1111),AIR1167,IEST-RP-CC028
PublisherName	International Organization for Standardization
Status	Current

Standards	Relationship
UNI EN ISO 14644-15:2018	Identical
SS-EN ISO 14644-15 : 2017	Identical
DIN EN ISO 14644-15:2016-05 (Draft)	Identical
EN ISO 14644-15:2017	Identical
DIN EN ISO 14644-15:2018-03	Identical
SN EN ISO 14644-15:2018	Identical
BS EN ISO 14644-15:2017	Identical
UNE-EN ISO 14644-15:2018	Identical

IEST RP CC002 : 1998	RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
SEMI E49 : 2017	GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004	CLEANROOM OPERATIONS
ISO 8573-8:2004	Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017)	TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 14644-14:2016	Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
ISO 2889:2010	Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
IEST RP CC013 : 86-T	EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
ISO 16000-9:2006	Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
VDI 2083 Blatt 9.1:2006-12	Clean room technology - Compatibility with required cleanliness and surface cleanliness
ISO 16000-6:2011	Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
SEMI F28 : 2003(R2015)	TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002