ISO 21466:2019
Current
The latest, up-to-date edition.
Microbeam analysis Scanning electron microscopy Method for evaluating critical dimensions by CD-SEM
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
English
12-13-2019
This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and photomask by imaging with a critical dimension scanning electron microscope (CD-SEM) by the model-based library (MBL) method. The method is applicable to linewidth determination for specimen, such as, gate on wafer, photomask, single isolated or dense line feature pattern down to size of 10 nm.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.