SEMI C6-3 : 1989(R2011)
Current
Current
The latest, up-to-date edition.
PARTICLE SPECIFICATION FOR GRADE 20/0.2 HYDROGEN (H[2]) DELIVERED AS PIPELINE GAS
Published date
01-12-2013
Sets a maximum permissible particle concentration for 20/0.2 hydrogen gas and describes a reference method for its verification.
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