SEMI E30.3 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TESTING EQUIPMENT SPECIFIC EQUIPMENT MODEL (TESM)
03-01-2003
01-12-2013
Gives a Specific Equipment Model for testing equipment (TSEM). The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in the Generic Equipment Model (GEM), SEMI E30. The intent of this document is to facilitate the integration of testing equipment into an automated semiconductor factory.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.