SEMI E49.9 : 1998
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
GUIDE FOR ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
03-01-2003
01-12-2013
Describes guidelines for ultrahigh purity (UHP) gas distribution systems in semiconductor production equipment. Gas distribution systems consist of stainless steel (SS) piping designed to supply the following types of gases to the process chamber: specialty gases (corrosive, flammable, pyrophoric, oxidizer, toxic, inert, and mixtures) and bulk gases (nitrogen, oxygen, argon, hydrogen, and helium).
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