SEMI E50 : 1995
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
INTEGRATED SMIF INDEXER APPLICATION MODEL FOR THE SENSOR/ACTUATOR NETWORK
07-23-2013
01-12-2013
Covers an application level device model for integrated SMIF indexers. It ensures the interoperability of integrated SMIF indexers with semiconductor processing equipment controllers on the application level. It defines the messages provided, commands accepted and variables maintained and sent on request by an Integrated SMIF Indexer. This standard complements SEMI E54 (Sensor/Actuator Network Common Device Model).
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