Name: SEMI M32 : 2007
Brand: SEMI

GUIDE TO STATISTICAL SPECIFICATIONS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes an explicit specification form that defines the risk level as a part of parametric specifications.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI M32 : 2007