Name: SEMI M68 : MAR 2015
Brand: SEMI

TEST METHOD FOR DETERMINING WAFER NEAR-EDGE GEOMETRY FROM A MEASURED HEIGHT DATA ARRAY USING A CURVATURE METRIC, ZDD

Superseded date

10-05-2020

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Includes calculation of near-edge curvature ZDD (radial double derivative of z [height]).

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2007)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI M68:2020

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SEMI M70 : 2015	TEST METHOD FOR DETERMINING WAFER-NEAR-EDGE GEOMETRY USING PARTIAL WAFER SITE FLATNESS

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