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SEMI MF1393 : 2002

Current
Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING NET CARRIER DENSITY IN SILICON WAFERS BY MILLER FEEDBACK PROFILER MEASUREMENTS WITH A MERCURY PROBE
Published date

01-12-2013

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI M2 : 2003 SPECIFICATION FOR SILICON EPITAXIAL WAFERS FOR DISCRETE DEVICE APPLICATIONS
SEMI MF1618 : 2010(R2015) PRACTICE FOR DETERMINATION OF UNIFORMITY OF THIN FILMS ON SILICON WAFERS
SEMI M11 : 2004 SPECIFICATIONS FOR SILICON EPITAXIAL WAFERS FOR INTEGRATED CIRCUIT (IC) APPLICATIONS

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