Name: SEMI P2 : 2008
Brand: SEMI

SPECIFICATION FOR CHROME THIN FILMS FOR HARD SURFACE PHOTOMASKS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the general requirements of the chrome thin film for hard surface photomasks.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (03/2008)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES

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SEMI P2 : 2008