VDI/VDE 2655 Blatt 1.1:2008-03
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
Hardcopy , PDF
02-02-2024
German - English
03-01-2008
Preliminary note
Introduction
1. Scope
2. Terms and definitions
3. Symbols and subscript symbols
4. Properties of the interference microscope
5. Reference standards and calibration methods
6. Report of results of instrument calibration
7. Measurement uncertainty
Bibliography
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