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ÖNORM EN ISO 14644-9:2022 11 01

Current

Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

Available format(s)

Hardcopy

Language(s)

German - English

Published date

11-01-2022

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications.

Committee
ISO/TC 209
DocumentType
Standard
Pages
36
PublisherName
Osterreichisches Normungsinstitut/Austrian Standards
Status
Current
Supersedes

Standards Relationship
ISO 14644-9:2022 Identical
EN ISO 14644-9:2022 Identical

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