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05/30104054 DC : DRAFT APR 2005

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

IEC 62047-3 - SEMICONDUCTOR DEVICES - PART 3: MICRO ELECTROMECHANICAL DEVICES - THIN FILM STANDARD TEST PIECE
Superseded date

11-30-2006

Published date

11-23-2012

Committee
EPL/47
DocumentType
Draft
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 15490:2008 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for tensile strength of monolithic ceramics at room temperature
IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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