05/30142385 DC : DRAFT NOV 2005

Name: 05/30142385 DC : DRAFT NOV 2005
Brand: BSI

Superseded

ISO 14644-6 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 6: VOCABULARY

Superseded date

08-31-2007

Published date

11-23-2012

Publisher

British Standards Institution

1 Scope
2 Normative references
3 Terms and definitions

Committee	LBI/30
DocumentType	Draft
PublisherName	British Standards Institution
Status	Superseded
SupersededBy	BS EN ISO 14644-6:2007

ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 14698-2:2003	Cleanrooms and associated controlled environments Biocontamination control Part 2: Evaluation and interpretation of biocontamination data
ISO 14644-2:2015	Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 14644-5:2004	Cleanrooms and associated controlled environments — Part 5: Operations
ISO 14698-1:2003	Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
ISO 14644-3:2005	Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-7:2004	Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 14644-4:2001	Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up

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