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08/30172398 DC : DRAFT FEB 2008

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN 62047-8 - SEMICONDUCTOR DEVICES - MICRO - ELECTROMECHANICAL DEVICES - PART 8: STRIP BENDING TEST METHOD FOR TENSILE PROPERTY MEASUREMENT OF THIN FILMS

Superseded date

06-30-2011

Published date

11-23-2012

BS EN 62047-8

Committee
EPL/47
DocumentType
Draft
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 15490:2008 Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for tensile strength of monolithic ceramics at room temperature
IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 62047-3:2006 Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

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