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08/30190157 DC : DRAFT SEP 2008

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN ISO 14644-9 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 9: CLASSIFICATION OF SURFACE PARTICLE CLEANLINESS
Superseded date

08-31-2012

Published date

11-23-2012

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Classification system
6 Demonstration of compliance
Annex A (informative) - Descriptor for specific particle
        size ranges
Annex B (informative) - Parameters influencing the SPC
         classification
Annex C (informative) - Surface characteristics
Annex D (informative) - Measurement methods for testing
        surface particle cleanliness
Bibliography

BS EN ISO 14644-9

Committee
LBI/30
DocumentType
Draft
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

SEMI E78 : 2012 GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
ISO/IEC TR 10000-1:1998 Information technology Framework and taxonomy of International Standardized Profiles Part 1: General principles and documentation framework
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 10015:1999 Quality management Guidelines for training
ISO 16232-3:2007 Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing
EN 61340-5-1:2016/AC:2017-05 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017)
IEC 61340-5-1:2016 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
ISO 16232-2:2007 Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation
ISO 16232-5:2007 Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench
ISO 16232-4:2007 Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques
ISO/TR 22971:2005 Accuracy (trueness and precision) of measurement methods and results Practical guidance for the use of ISO 5725-2:1994 in designing, implementing and statistically analysing interlaboratory repeatability and reproducibility results
IEC TR 61340-5-2:2007 Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide
ISO 10576-1:2003 Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles
SEMI E43 : 2013 RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES
IEST RP CC022.2 : 2004(R2008) ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO/TS 21748:2004 Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 5725-2:1994 Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method
EN 61340-5-2:2001/corrigendum:2001 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE
IEC 61340-4-6:2015 Electrostatics - Part 4-6: Standard test methods for specific applications - Wrist straps

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