09/30196967 DC : 0
Current
The latest, up-to-date edition.
BS EN ISO 25178-603 - GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS
Hardcopy , PDF
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Metrological characteristics of the instrument
4 Description of the metrological characteristics
4.1 General
4.2 Overview
4.3 Metrological characteristics
Annex A (informative) - Components of a phase shifting
interferometric (PSI) microscope
Annex B (informative) - Phase shifting interferometric (PSI)
microscope - Theory of operation
Annex C (informative) - Errors and corrections for phase
shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS matrix model
Bibliography
Important note : All end users must be registered with an Account prior to user licenses being assigned.Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.