09/30207175 DC : 0

Superseded

BS EN 62276 - SINGLE CRYSTAL WAFERS FOR SURFACE ACOUSTIC WAVE (SAW) DEVICE APPLICATIONS - SPECIFICATIONS AND MEASURING METHOD

Available format(s)

Hardcopy , PDF

Superseded date

02-28-2013

Language(s)

English

Publisher

British Standards Institution

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
   4.1 Material specification
   4.2 Wafer specifications
5 Sampling
   5.1 Sampling
   5.2 Sampling frequency
   5.3 Inspection of whole population
6 Test methods
   6.1 Diameter
   6.2 Thickness
   6.3 Dimension of OF
   6.4 Orientation of OF
   6.5 TV5
   6.6 Warp
   6.7 TTV
   6.8 Front surface defects
   6.9 Inclusions
   6.10 Back surface roughness
   6.11 Orientation
   6.12 Curie temperature
   6.13 Lattice constant
7 Identification, labeling, packaging, delivery condition
   7.1 Packaging
   7.2 Labelling and identification
   7.3 Delivery condition
8 Measurement of Curie temperature
   8.1 General
   8.2 DTA method
   8.3 Dielectric constant method
9 Measurement of lattice constant (Bond method)
10 Measurement of face angle by X-ray
   10.1 Measurement principle
   10.2 Measurement method
   10.3 Measuring surface orientation of wafer
   10.4 Measuring OF flat orientation
   10.5 Typical wafer orientations and reference planes
11 Measurement of bulk resistivity
   11.1 Resistance measurement of a wafer
   11.2 Electrode
   11.3 Bulk resistivity
12 Visual inspections

BS EN 62276

Committee	EPL/49
DocumentType	Draft
Pages	41
PublisherName	British Standards Institution
Status	Superseded
SupersededBy	BS EN 62276:2016

ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ASTM F 154 : 2002	Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
IEC 61019-1:2004	Surface acoustic wave (SAW) resonators - Part 1: Generic specification
IEC 60410:1973	Sampling plans and procedures for inspection by attributes
IEC 60862-1:2015	Surface acoustic wave (SAW) filters of assessed quality - Part 1: Generic specification
IEC 60758:2016	Synthetic quartz crystal - Specifications and guidelines for use
IEC 61019-2:2005	Surface acoustic wave (SAW) resonators - Part 2: Guide to the use
IEC 60862-2:2012	Surface acoustic wave (SAW) filters of assessed quality - Part 2: Guidelines for the use
IEC 60862-3:2003	Surface acoustic wave (SAW) filters of assessed quality - Part 3: Standard outlines
ASTM F 657 : 1992 : R1999	Standard Test Method for Measuring Warp and Total Thickness Variation on Silicon Wafers by Noncontact Scanning (Withdrawn 2003)
IEC 61019-3:1991	Surface acoustic wave (SAW) resonators - Part 3: Standard outlines and lead connections