11/30230316 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS EN 62047-18 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 18: BENDING TEST METHODS OF THIN FILM MATERIALS
Hardcopy , PDF
10-31-2013
English
FOREWORD
1 Scope
2 Normative references
3 Symbols and designations
4 Test Piece
5 Testing method
6 Test report
Annex A (Informative) - Precautions necessary for the
specimen/substrate interface
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