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13/30203227 DC : 0

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS ISO 13083 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - STANDARDS ON THE DEFINITION AND CALIBRATION OF SPATIAL RESOLUTION OF SCANNING SPREADING RESISTANCE MICROSCOPY AND SCANNING CAPACITANCE MICROSCOPY
Available format(s)

Hardcopy , PDF

Superseded date

08-31-2015

Language(s)

English

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
6 Measurement of lateral resolution of SCM with the sharp-edge
  method
7 Measurement of lateral resolution of SSRM with the sharp-edge
  method
Annex A (informative) - An example of the measurement of SCM
        resolution
Annex B (informative) - An example of the measurement of SSRM
        resolution
Bibliography

BS ISO 13083

Committee
CII/60
DocumentType
Draft
Pages
20
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

ISO 18115:2001 Surface chemical analysis Vocabulary
ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution

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