13/30281604 DC : 0

Superseded

BS ISO 14706 - SURFACE CHEMICAL ANALYSIS - DETERMINATION OF SURFACE ELEMENTAL CONTAMINATION ON SILICON WAFERS BY TOTAL-REFLECTION X-RAY FLUORESCENCE (TXRF) SPECTROSCOPY

Available format(s)

Hardcopy , PDF

Superseded date

07-31-2014

Language(s)

English

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative reference
3 Terms and definitions
4 Abbreviated terms
5 Principle
6 Apparatus
7 Environment for specimen preparation and measurement
8 Calibration reference materials
9 Safety
10 Measurement procedure
11 Expression of result
12 Precision
13 Test report
Annex A (informative) - Reference materials
Annex B (informative) - Relative sensitivity factor
Annex C (informative) - Preparation of reference materials
Annex D (informative) - VPD-TXRF method
Annex E (informative) - Glancing-angle settings
Annex F (informative) - International inter-laboratory test
results
Bibliography

BS ISO 14706

Committee	CII/60
DocumentType	Draft
Pages	31
PublisherName	British Standards Institution
Status	Superseded
SupersededBy	BS ISO 14706:2014

ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 5725-2:1994	Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method