14/30266479 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS ISO 17109 - SURFACE CHEMICAL ANALYSIS - DEPTH PROFILING - A METHOD FOR SPUTTER RATE DETERMINATION IN X-RAY PHOTOELECTRON SPECTROSCOPY, AUGER ELECTRON SPECTROSCOPY AND SECONDARYION MASS SPECTROMETRY SPUTTER DEPTH PROFILING USING SINGLE AND MULTI-LAYER THIN FILMS
Hardcopy , PDF
08-31-2015
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Requirement of single and multi-layer reference
thin films
5 Determination of sputtering rate
Annex A (Informative) - Report of international
Round Robin Test
Bibliography
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